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Industrie des semi-conducteurs
Applications > Technique de mesure optique > Industrie des semi-conducteurs

Contrôle en ligne de la qualité des tranches

 Les applications de l'industrie des semi-conducteurs nécessitent une résolution latérale dans la plage micrométrique et une résolution en hauteur dans la plage submicronique. Dans le contrôle de la qualité en ligne, les capteurs mesurent l'épaisseur des tranches, définissent les structures des semi-conducteurs dans la production de masques et vérifient les connexions. Par ailleurs, ils mesurent les revêtements transparents, déterminent les épaisseurs de peinture et contrôlent les processus de décapage mécaniques et chimiques en temps réel. Les capteurs CHRocodile permettent de réaliser une mesure fiable aussi bien dans un bain acide que dans l'ultravide.

CHRocodile MI5
Quality assurance measurements in the manufacturing process of semiconductors

Many manufacturing processes are dealing with the removal of layers. For example, during wet etching, solid material is converted into liquid compounds with help of a chemical solution. To check the process optical sensors are used. Sensors are used as well to check rinsing processes that allow contaminants to be removed from the wafer surface.

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CHRocodile LR
Encapsulation of chips with dispensing machines (dam and fill procedure)

With procedures called dam and fill, first of all a dam made of a viscous cast compound is set up on the circuit board that completely surrounds the chip. Then a dispensing machine dispenses a material to the inner area of the dam that has a low as possible viscosity. This surrounds the delicate structures and wires completely until the component is completely covered. Precitec chromatic confocal sensors measure the height of these chip cast compound dams without touching them accurately to within a few microns. This ensures that the dam height is sufficient for the subsequent cast of the inner area and the protective paint does not run over unprotected areas. The speed of the measuring procedure enables a 100% check of all components manufactured. As a result, casting components is also suitable for high volume, fully automatic manufacturing.

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CHRocodile CLS
Measuring glue beads

In the case of glue beads, they often still rely on a visual inspection. It is important that the glue bead trail is continuous and constant. Several parameters are used as quality criteria that can be determined by optical measuring systems. The glue bead must run in the middle with regard to other structures. Undesirable accumulations of material at the start and end point of the bead can be detected. Even gaps can be detected.

CHRocodile 2 IT HTW
Circuit board layer thicknesses

The layer thicknesses of silicon casting compounds or solder resist can be measured. Basically there are two different measuring procedures here, chromatic measuring and interferometric measuring. Silicon casting compound can be measured both chromatically and interferometrically. The layer thickness of coloured solder resist can also be measured with the interferometric measuring method. Here the interferometric method has slight advantages over chromatic measuring because it can tolerate a measuring distance deviation of a few millimeters. A 3D measuring device is required if necessary to adjust the measuring distance so that the measured surface is within the permissible operating range of the measuring head.

CHRocodile CLS
Through Silicon Via (TSV)

Through Silicon Via is a mainly vertical electrical metal connection by a wafer. Here a vertical pile of thinned out individual chips is connected through using small copper structures. After the etching process these protrude a little above the silicon and are known as bumps. The TSV structures before filling – which are holes with a high aspect ratio – and the bumps that occur after filling can themselves be measured with Precitec sensors. The height of the bumps over the silicon structures and the depth of the TSVs are required.

CHRocodile CLS
Chip handling: Chip bonding, OLED & LED chips

Metallic OLED display masks can be measured with the line sensor CHRocodile CLS. Imperfections can be reliably detected here. The sensors are also suitable for the ever more compact LED chip packages for high levels of illumination and small form factors, such as is common for LED background lighting and LC screens. Both cutting profiles and also topographies can be created. When the chips are assembled, Precitec Optronik sensors determine the correct position of chips.

Often individual LED are no longer used but highly integrated chips with a large number of light diodes. When testing these optical chips, contact-free measuring distance sensors are already used to a large extent today. These can measure the height of the LED (Z co-ordinates).

CHRocodile 2 IT DW
Mesure de l'épaisseur de tranches fortement dopées

Both high and low doped wafers can be measured to determine the thickness with interferometric measuring systems in the infrared range. Other quality criteria are bowing and warping that are taken into account particularly with very thin wafers. The structures applied in layers can distort wafers. The level of distortion can be determined very accurately with distance sensors.

Gamme de produits CHRocodile 2 IT
Mesure sans contact des tranches

Les capteurs de la gamme CHRocodile IT permettent une mesure à la fois simple et très précise de la distance et de l'épaisseur de couche des tranches et des cellules solaires. Ces capteurs optiques sont capables de mesurer sans contact le silicium jusqu'à une épaisseur de 1 mm avec une seule tête de mesure. La détermination exacte de l'épaisseur jusqu'aux bords est très importante pour obtenir des produits de qualité optimale. CHRocodile IT garantit cette précision grâce à un point de mesure particulièrement petit. Cependant, les capteurs de la gamme CHRocodile IT sont capables de bien plus encore : la mesure de tranches GaAs, de films non transparents et de systèmes multicouches. Leur construction robuste et simple permet l'intégration directe dans le processus de production. Bien entendu, ces appareils conviennent également pour la mesure à la fois économique et très précise d'épaisseurs de couche en laboratoire.

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