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CHRocodile DW 2

CHRocodile 2 IT DW


CHRocodile 2 IT DW

The optical sensors of CHRocodile 2 IT DW series work with infrared light and have been specially optimized for the non-contact measurement of the thickness of heavily doped wafers. Further fields of application include the thickness measurement of visually opaque and transparent plastics. The interferometric measuring technique allows high-resolution and robust measurement from one side. The extraordinarily high dynamic response and the outstanding signal-to-noise ratio of the CHRocodile sensors ensure the best measuring results.

  • for undoped / high-doped wafers 
  • plastics
  • measuring on one side
  • inline and offline
  • high lateral resolution
  • distance measurement (optional)
  • simple integration
  • large measuring distance range of tolerance
  • measurements/seconds: 70,000
  • interferometric measuring range: 15 µm - 7500 µm
  • resolution: 3 x 10-6 x max. measuring range
  • reproducibility: 10-4 x max. measuring range
  • synchronization with external devices: trigger input, synchronization output, 5 encoder input
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Dr. Jochen Schulze
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