Wafers and multi-layer structures. Modular design. Up to 4.000 measurements/second. Interferometric measuring range 37 µm - 8.200 µm

Doped wafers and multi-layer structures. Up to 4.000 measurements/second. Interferometric measuring range 15 µm - 2.000 µm

Wafers and multi-layer structures. Also for rough wafers (RW). Up to 4.000 measurements/second. Interferometric measuring range 37 µm - 8.200 µm, respectively 45 µm - 7.300 µm (RW)

Wafers and multi-layer structures. Up to 4.000 measurements/second. Interferometric measuring range 18 µm - 3.000 µm

Wafers and multi-layer structures. Up to 4.000 measurements/second. Interferometric measuring range 150 µm - 15.000 µm

Thin wafers and multi-layer structures. Up to 4.000 measurements/second. Interferometric measuring range 4 µm - 300 µm

Plastic films. Up to 4.000 measurements/second. Interferometric measuring range 15 µm - 500 µm