Doped wafers and multi-layer structures. Up to 70.000 measurements/second. Interferometric measuring range 15 µm - 7500 µm

Wafers and multi-layer structures. Also for rough wafers (RW). Up to 70.000 measurements/second. Interferometric measuring range 38 µm - 8200 µm, respectively 44 µm - 6400 µm (RW)

Wafers and multi-layer structures. Up to 4.000 measurements/second. Interferometric measuring range 29 µm - 3200 µm

Thin wafers and multi-layer structures. Up to 4.000 measurements/second. Interferometric measuring range 4 µm - 200 µm